Differential capacitive pressure sensor and fabricating method therefor
US6651506B2 · kind B2 · utility
Assignee
Inventors
Key dates
| Filing date | Mar 15, 2002 |
| Grant date | Nov 25, 2003 |
| Priority date | — |
| Expiry date | Mar 15, 2022 |
Classification
- Technology area (CPC G)Physics
- CPC primaryG01L9/0073
- WIPO fieldMeasurement
- WIPO sectorInstruments
Abstract
A pressure sensor using two capacitors for measuring a pressure stimulus includes a substrate having a diaphragm positioned at a center portion thereof. The diaphragm has a reduced thickness so that the diaphragm displaces upward and downward in response to a pressure stimulus. A first capacitor is provided on the diaphragm and at least a second capacitor is provided on a bulk portion of the substrate so as to be adjacent to the first capacitor. The first and the second capacitor are connected to each other in series, wherein capacitance differs between the first and the second capacitor when the diaphragm moves up and down in response to the pressure stimulus.
Source: USPTO / EPO open patent data. Objective bibliographic and citation counts.