Polyfluorinated epoxides and associated polymers and processes
US6653419B1 · kind B1 · utility
7Cited by
5References
12Claims
0Family size
Assignee
Inventors
Key dates
| Filing date | Oct 3, 2001 |
| Grant date | Nov 25, 2003 |
| Priority date | — |
| Expiry date | Oct 3, 2021 |
Classification
- Technology area (CPC C)Chemistry; Metallurgy
- CPC primaryC08G65/226
- WIPO fieldOrganic fine chemistry
- WIPO sectorChemistry
Abstract
A method for producing partially fluorinated epoxides and corresponding polyether homopolymers of these polyfluorinated epoxides is described. Also described is a method for incorporating a fluoroalcohol functional group into a polymer as a pendant group. Certain perfluorinated olefins are also described. These polyfluorinated epoxides and the associated polymers and methods relating to them are useful components in photoresists, particulary in lithographic photoresists for use at low ultraviolet wavelengths (e.g., 157 nm).
Source: USPTO / EPO open patent data. Objective bibliographic and citation counts.