Micromechanical optical switch
US6654157B2 · kind B2 · utility
Assignee
Inventors
Key dates
| Filing date | Aug 22, 2002 |
| Grant date | Nov 25, 2003 |
| Priority date | — |
| Expiry date | Aug 22, 2022 |
Classification
- Technology area (CPC G)Physics
- CPC primaryG02B6/3594
- WIPO fieldOptics
- WIPO sectorInstruments
Abstract
An optical switch element is described, which includes a fixed layer disposed outwardly from a substrate and a movable mirror assembly disposed outwardly from the fixed layer. The moveable mirror assembly is operable to move relative to the fixed layer responsive to a voltage applied to the movable mirror assembly. In a particular embodiment, the movable mirror assembly includes an inner strip spaced apart from the fixed layer by a first distance and an outer strip disposed approximately adjacent to the inner strip and spaced apart from the fixed layer by a second distance which is greater than the first distance. The optical transmission of the optical switch element changes depending on the position of the movable mirror assembly.
Source: USPTO / EPO open patent data. Objective bibliographic and citation counts.