Patent · US Expired

Scanning microscope with multiband illumination and optical component for a scanning microscope with multiband illumination

US6654166B2 · kind B2 · utility

8Cited by
5References
18Claims
0Family size

Assignee

Inventors

Key dates

Filing dateJun 15, 2001
Grant dateNov 25, 2003
Priority date
Expiry dateAug 2, 2021

Classification

  • Technology area (CPC H)Electricity
  • CPC primaryH01S3/1636
  • WIPO fieldOptics
  • WIPO sectorInstruments

Abstract

A scanning microscope is disclosed, through which a sample (14) can be illuminated and detected. An illumination pinhole and a detection pinhole (10, 16) are respectively arranged in the illumination beam path and in the detection beam path (8, 15), an optical component (4), which generates at least to some extent spectrally broadened illumination light, is provided in the illumination beam path (8). A polarization-independent and wavelength-independent beam splitter (11) is arranged in a fixed position in the illumination beam path and the detection beam path (8, 15).

Source: USPTO / EPO open patent data. Objective bibliographic and citation counts.