Polyimide optical waveguide
US6654535B2 · kind B2 · utility
Assignee
Inventors
Key dates
| Filing date | Sep 7, 2001 |
| Grant date | Nov 25, 2003 |
| Priority date | — |
| Expiry date | Oct 15, 2021 |
Classification
- Technology area (CPC G)Physics
- CPC primaryG02B1/046
- WIPO fieldOptics
- WIPO sectorInstruments
Abstract
An optical waveguide is produced by forming on a substrate a waveguide layer and/or a clad layer containing, as their main ingredient, polyimide with a fluorine substitution rate of 30% or higher (thus as a fluorinated polyimide layer), with a primer layer laid in between that contains, as its main ingredient, polyimide with a fluorine substitution rate of 10% or lower (including 0%). This improves adherence of the fluorinated polyimide layer to the substrate and prevents the fluorinated polyimide layer from peeling off the substrate. For more effective prevention of such peeling-off and of warping of the substrate, the primer layer is preferably formed to have a thickness of 0.1 to 20 &mgr;m. The primer layer may contain a coupling agent.
Source: USPTO / EPO open patent data. Objective bibliographic and citation counts.