Micromechanic pump

US6655923B1 · kind B1 · utility

Assignee

• Max-Planck-Gesellschaft zur Föderung der Wissenschaften e.V. · US

Inventors

• Thomas Lisec · Itzehoe, DE
• Bernd Wagner · Looft, DE

Key dates

• Filing date: Mar 22, 2002
• Grant date: Dec 2, 2003
• Expiry date: Mar 22, 2022

Classification

• Technology area (CPC B): Performing Operations; Transporting
• CPC primary: B81C2201/019
• WIPO field: Engines, pumps, turbines
• WIPO sector: Mechanical engineering

Abstract

A micromechanical pump has a membrane (2) positioned above a substrate (1). The substrate is provided with a cavity (8) which is formed in an endlessly continuous shape (e.g., circular) to provide a channel for a drive fluid. A cover (9) is positioned above the substrate with the membrane being between the substrate and cover. The cover is provided with an inlet (11) and outlet (10). Electrodes (3, 4) are provided around the floor of the cavity. The electrodes are selectively actuated so as to attract selected areas of the membrane resulting in a gap forming between the cover and the selected areas of the membrane. The areas of the membrane above the non-selected electrodes form a seal with the cover. By selectively actuating the electrodes a peristaltic pumping action results in a pumped fluid traveling from the inlet, through the gaps and out the outlet.