Method and apparatus for creating an open cell micro-environment for treating a substrate with an impingement spray
US6656017B2 · kind B2 · utility
Inventor
Key dates
| Filing date | Apr 24, 2002 |
| Grant date | Dec 2, 2003 |
| Priority date | — |
| Expiry date | Apr 24, 2022 |
Classification
- Technology area (CPC B)Performing Operations; Transporting
- CPC primaryB24C9/00
- WIPO fieldMachine tools
- WIPO sectorMechanical engineering
Abstract
The present invention is a method and apparatus for providing a low-cost and less complex micro-environment for treating a substrate using an impingement cryogenic or steam spray jet. A substrate and fixture is contained within an open-architecture prophylactic or cleaning cell whereupon the substrate and fixture is continuously bathed in a regenerated and re-circulating stream of filtered, inert, dry, heated and ionized atmosphere which bathes both the entire substrate and fixture. This prevents the intrusion of contaminating ambient atmospheres onto critical surfaces. The cleaning cavity is constantly regenerated and re-circulated through the cleaning cell to maintain a majority of the clean atmosphere wherein the clean cavity is pressurized slightly with a small volume of clean dry air or inert gas to prevent the intrusion of ambient atmosphere into the cleaning cell. A small exhaust duct removes the partial pressure of atmosphere from the open regions of the cleaning cavity, capturing the escaping cavity atmosphere. The exemplary spray cleaning applicator of the present invention provides a majority of the make-up atmosphere required to operate the cleaning cell. The treated su…
Source: USPTO / EPO open patent data. Objective bibliographic and citation counts.