Method and device for producing aerogels

US6656527B1 · kind B1 · utility

Inventors

• Thomas Gessner · Plymouth, US
• E. Stefan Schulz · Chemnitz, DE
• Thoralf Winkler · Gauernitz, DE

Key dates

• Filing date: Jul 3, 2002
• Grant date: Dec 2, 2003
• Expiry date: Jul 3, 2022

Classification

• Technology area (CPC H): Electricity
• CPC primary: H01L21/02282
• WIPO field: Semiconductors
• WIPO sector: Electrical engineering

Abstract

A method of producing an aerogel layer on a substrate is described. A precursor mixture is provided by mixing at least one material selected from the group consisting of silicates, metal alcolates, aluminates and borates with a solvent. The precursor mixture is used to form a lyosol. The precursor mixture or the lyosol formed therefrom is then applied to the substrate wherein a layer of the lyosol is formed on the substrate. A gel is formed from the lyosol by chemical conversion at a temperature at which the solvent is present in a liquid state. At a pressure between 0.5-2.0 torr the ambient temperature is reduced by about 3-70k below the point at which the solvent is converted into a solid state. The solvent is then converted into a gaseous state in a drying chamber while reducing the pressure of the solvent below the triple point and removing solvent from the gel layer.