Method for examination of a surface layer

US6656678B1 · kind B1 · utility

Assignee

• Micronas GmbH · DE

Inventors

• Bernhard Wolf · Poing, DE
• Hans-Jurgen Gahle · Emmendingen, DE
• Gunter Igel · Teningen, DE
• Werner Baumann · Bogen, DE
• Ralf Ehret · Merdingen, DE
• Mirko Lehmann · Glückstadt, DE

Key dates

• Filing date: Jun 1, 2000
• Grant date: Dec 2, 2003
• Expiry date: Jun 1, 2020

Classification

• Technology area (CPC G): Physics
• CPC primary: G01N21/94
• WIPO field: Measurement
• WIPO sector: Instruments

Abstract

In a method for examination of the surface of an object for a topographic and/or a chemical property, the object-surface is impinged with surface-structure selective biocomponents for examination of a topographic property and/or with chemoselective biocomponents for the examination of a chemical property, together with a nutrient medium and/or an osmotic protective medium for the biocomponents. The biocomponents contained in the nutrient medium and/or the osmotic protective medium are in contact with the object-surface or are spaced from the object surface by less than the detection range of the biocomponents. The object surface is then examined with the biocomponents contained in the nutrient medium and/or the osmotic protective medium by determining at least one examination measurement value. The examination measurement value is compared with a reference measurement value, and conclusions can be drawn about the topographic and/or chemical properties of the object from the result of the comparison. Using the method, an object surface can be examined for a topographic and/or chemical property in a simple manner with a high measuring sensitivity.