Scanning magnetic microscope having improved magnetic sensor
US6657431B2 · kind B2 · utility
Assignee
Inventor
Key dates
| Filing date | Jun 6, 2001 |
| Grant date | Dec 2, 2003 |
| Priority date | — |
| Expiry date | Jun 6, 2021 |
Classification
- Technology area (CPC G)Physics
- CPC primaryG01R33/0385
- WIPO fieldMeasurement
- WIPO sectorInstruments
Abstract
A scanning magnetic microscope includes a specimen stage for holding a specimen to be examined; a sensor for sensing a magnetic field generated by the specimen, the sensor including one of a magnetic tunneling junction (MTJ) sensor, a spin valve sensor, or an extraordinary Hall effect sensor; translation apparatus for translating the sensor relative to a surface of said specimen; and a data processor, having an input coupled to an output of said sensor, for constructing an image of said magnetic field. In another embodiment a read/write head from a hard disk drive is shown to make a suitable magnetic sensor. The scanning magnetic microscope can be used for examining the current flow in integrated circuits and related phenomenon, such as electromigration, as well as magnetic data storage media and biomagnetic systems, to mention a few suitable applications.
Source: USPTO / EPO open patent data. Objective bibliographic and citation counts.