Patent · US Expired

Micromechanical alternating and direct voltage reference apparatus

US6657442B1 · kind B1 · utility

3Cited by

6References

9Claims

0Family size

Assignee

VALTION TEKNILLINEN TUTKIMUSKESKUS · FI

Inventors

Heikki Seppä · Helsinki, FI
Aarne Oja · Espoo, FI
Mika Suhonen · Helsinki, FI

Key dates

Filing date	Dec 22, 2000
Grant date	Dec 2, 2003
Priority date	—
Expiry date	Dec 22, 2020

Classification

Technology area (CPC G)Physics
CPC primaryG01R19/22
WIPO fieldMeasurement
WIPO sectorInstruments

Abstract

An AC/DC voltage reference system has at least one micromechanically fabricated electrode pair having first and second electrodes facing each other so that the electrodes are disposed at a distance from each other, whereby at least one of the electrodes is movable against a spring force. An AC signal is applied over the electrodes to establish an electrostatic force at a frequency substantially higher than the effective mechanical resonant frequency of the movable electrode. The system further includes an apparatus for detecting the AC voltage applied between the electrodes, thus forming an AC voltage reference.

Source: USPTO / EPO open patent data. Objective bibliographic and citation counts.