Optical switch using movable micromechanical cantilevers and evanescent coupling
US6658176B2 · kind B2 · utility
Assignee
Inventor
Key dates
| Filing date | Aug 13, 2001 |
| Grant date | Dec 2, 2003 |
| Priority date | — |
| Expiry date | May 7, 2022 |
Classification
- Technology area (CPC G)Physics
- CPC primaryG02B6/42
- WIPO fieldOptics
- WIPO sectorInstruments
Abstract
A micromechanical optical switch structure, that may be integrated to form an array of optical switches, switches light between a main waveguide and a switched waveguide. The switched waveguide has a coupling portion and two flexible portions and is coupled to a movable cantilever arm. The cantilever arm is configured to move at least the coupling portion of the switched waveguide between first and second positions with respect to the main waveguide. In the first position, the switched waveguide is evanescently coupled to the main waveguide and in the second position, the switched waveguide is not evanescently coupled to the main waveguide. The movable cantilever arm may be formed with bimaterial arms that move the switched waveguide in response to heat or a piezoelectric potential being applied to the arm or they may be formed with an electrostatic plate that moves the arms in response to an electrostatic potential.
Source: USPTO / EPO open patent data. Objective bibliographic and citation counts.