Patent · US Expired

Microstructure elements and process for the production thereof

US6660151B1 · kind B1 · utility

9Cited by

9References

14Claims

0Family size

Assignee

Steag Microparts · DE

Inventors

Christoph Lessmöllmann · Gernsbach, DE
Joachim Eicher · Karlsruhe, DE
Holger Reinecke · Emmendingen, DE

Key dates

Filing date	Dec 21, 1995
Grant date	Dec 9, 2003
Priority date	—
Expiry date	Apr 12, 2019

Classification

Technology area (CPC B)Performing Operations; Transporting
CPC primaryB29K2883/00
WIPO fieldSemiconductors
WIPO sectorElectrical engineering

Abstract

A microstructured mold is produced from a solid body (metal, ceramic, glass, stone or monocrystalline material) by precision mechanical machining, additive or subtractive structuring. The mold insert is filled and covered by a flowable material and the solidified material is separated from the mold insert giving a microstructure element. The microstructure elements produced by the process have good material properties and can be prepared in a broad range of shapes and structures.

Source: USPTO / EPO open patent data. Objective bibliographic and citation counts.