Apparatus and method for reactive atom plasma processing for material deposition
US6660177B2 · kind B2 · utility
Assignee
Inventor
Key dates
| Filing date | Nov 7, 2001 |
| Grant date | Dec 9, 2003 |
| Priority date | — |
| Expiry date | Apr 25, 2022 |
Classification
- Technology area (CPC H)Electricity
- CPC primaryH01L21/31051
- WIPO fieldSurface technology, coating
- WIPO sectorChemistry
Abstract
Reactive atom plasma processing can be used to shape, polish, planarize, and clean surfaces of difficult materials with minimal subsurface damage. The apparatus and methods use a plasma torch, such as a conventional ICP torch. The workpiece and plasma torch are moved with respect to each other, whether by translating and/or rotating the workpiece, the plasma, or both. The plasma discharge from the torch can be used to shape, planarize, polish, clean and/or deposit material on the surface of the workpiece, as well as to thin the workpiece. The processing may cause minimal or no damage to the workpiece underneath the surface, and may involve removing material from, and/or redistributing material on, the surface of the workpiece.
Source: USPTO / EPO open patent data. Objective bibliographic and citation counts.