Patent · US Expired

Absolute position Moiré type encoder for use in a control system

US6660997B2 · kind B2 · utility

47Cited by
16References
92Claims
0Family size

Assignee

Inventors

Key dates

Filing dateApr 26, 2001
Grant dateDec 9, 2003
Priority date
Expiry dateSep 3, 2021

Classification

  • Technology area (CPC G)Physics
  • CPC primaryG01D2205/90
  • WIPO fieldMeasurement
  • WIPO sectorInstruments

Abstract

A method and apparatus are disclosed for a two-dimensional Moiré type absolute position encoder and an associated control system. A reticle having a pattern variation in two orthogonal directions is illuminated with radiation from a source which is structured so as to create a two dimensional Moiré interference at the reticle. Radiation pulses from the radiation source are multiplexed in time and the resulting interference fringes are converted into electronic signals using a detector. A controller uses the electrical signals to determine the absolute position of the reticle in two dimensions to within the area of a particular cell. After determining the particular cell location, the controller also employs the signals from the groups of radiation stripes to calculate an accurate position of the reticle within the cell.

Source: USPTO / EPO open patent data. Objective bibliographic and citation counts.