Patent · US Expired

Single level microelectronic device package with an integral window

US6661084B1 · kind B1 · utility

233Cited by
15References
36Claims
0Family size

Assignee

Inventors

Key dates

Filing dateFeb 25, 2002
Grant dateDec 9, 2003
Priority date
Expiry dateFeb 25, 2022

Classification

  • Technology area (CPC H)Electricity
  • CPC primaryH05K1/181
  • WIPO fieldSemiconductors
  • WIPO sectorElectrical engineering

Abstract

A package with an integral window for housing a microelectronic device. The integral window is bonded directly to the package without having a separate layer of adhesive material disposed in-between the window and the package. The device can be a semiconductor chip, CCD chip, CMOS chip, VCSEL chip, laser diode, MEMS device, or IMEMS device. The package can be formed of a multilayered LTCC or HTCC cofired ceramic material, with the integral window being simultaneously joined to the package during cofiring. The microelectronic device can be flip-chip interconnected so that the light-sensitive side is optically accessible through the window. A glob-top encapsulant or protective cover can be used to protect the microelectronic device and electrical interconnections. The result is a compact, low profile package having an integral window that is hermetically sealed to the package prior to mounting and interconnecting the microelectronic device.

Source: USPTO / EPO open patent data. Objective bibliographic and citation counts.