Method and apparatus for adjusting characteristics of multi electron source
US6661179B2 · kind B2 · utility
Assignee
Inventors
Key dates
| Filing date | Aug 26, 2002 |
| Grant date | Dec 9, 2003 |
| Priority date | — |
| Expiry date | Aug 26, 2022 |
Classification
- Technology area (CPC G)Physics
- CPC primaryG09G2320/0285
- WIPO fieldAudio-visual technology
- WIPO sectorElectrical engineering
Abstract
A method for adjusting electron emitting characteristics of a multi-electron source having plural electron emitting devices disposed on a substrate. The method comprises measuring electron emission characteristics of the devices and setting a characteristic adjustment target value. Plural characteristic shift voltages having discrete values are applied to some of the devices, electron emission characteristics of each of these devices are measured, and a characteristic adjustment table is generated for each characteristics shift voltage value according to change rates of these measured characteristics. A predetermined characteristics shift voltage value is selected based on the corresponding table, and that voltage is applied to the devices to cause their characteristics to shift towards the target value. A change in the electron emission characteristics is monitored to revise the characteristics shift condition.
Source: USPTO / EPO open patent data. Objective bibliographic and citation counts.