Buffer layer structures for stabilization of a lithium niobate device
US6661934B2 · kind B2 · utility
2Cited by
9References
5Claims
0Family size
Assignee
Inventors
Key dates
| Filing date | May 14, 2002 |
| Grant date | Dec 9, 2003 |
| Priority date | — |
| Expiry date | May 14, 2022 |
Classification
- Technology area (CPC G)Physics
- CPC primaryG02F2203/21
- WIPO fieldOptics
- WIPO sectorInstruments
Abstract
An optical waveguide device including an electro-optical crystal substrate having a top surface and a bottom surface; an optical waveguide path formed within a surface of the electro-optical crystal substrate; at least one electrode positioned above the optical waveguide path for applying an electric field to the optical waveguide path; and a silicon titanium oxynitride layer and a connecting layer for interconnecting the silicon titanium oxynitride layer to another surface of the electro-optical crystal substrate that is opposite to the surface in which the optical waveguide path is formed.
Source: USPTO / EPO open patent data. Objective bibliographic and citation counts.