Microvalve

US6663078B1 · kind B1 · utility

Assignee

• FESTO AG & CO. · US

Inventors

• Kurt Stoll · Eßlingen, DE
• Peter Post · Esslingen am Neckar, DE
• Michael Weinmann · Schorndorf, DE
• Herbert Vollmer · Notzingen, DE
• Andreas Muth · Tauberbischofsheim, DE

Key dates

• Filing date: Nov 13, 2000
• Grant date: Dec 16, 2003
• Expiry date: Nov 13, 2020

Classification

• Technology area (CPC F): Mechanical Engineering; Lighting; Heating
• CPC primary: F16K2099/008
• WIPO field: Mechanical elements
• WIPO sector: Mechanical engineering

Abstract

A microvalve, which contains a valve member (7) dividing a valve chamber (13) into two chamber parts (14 and 15). A first chamber part (14) is delimited by a duct layer (3), which has an input flow opening (17) and at least one output flow opening (22 and 23). Fluid transfer between the input flow opening (17) and the output flow opening (22 and 23) may be controlled by the valve member (7). Furthermore pressure relieving means are provided which are effective in the open position of the valve member (7), such means comprising at least one expansion recess (38) provided on the valve member and with at least partial overlap opposite to the output flow opening (22 and 23), same permitting an expansion of the transferring fluid. It is connected through valve member (7) with the second chamber part (15) so that a counter pressure may build up here causing the relief of pressure.