Micro liquid dispenser incorporating a liquid pillar injector and method for operating
US6663214B1 · kind B1 · utility
Assignee
Inventors
Key dates
| Filing date | Jul 16, 2002 |
| Grant date | Dec 16, 2003 |
| Priority date | — |
| Expiry date | Jul 16, 2022 |
Classification
- Technology area (CPC B)Performing Operations; Transporting
- CPC primaryB01L2400/0481
- WIPO fieldChemical engineering
- WIPO sectorChemistry
Abstract
A micro liquid dispenser that incorporates a liquid pillar injector and a method for depositing liquid on a substrate by the micro liquid dispenser are disclosed. The micro liquid dispenser is constructed by a liquid storage chamber, a micro-actuator and an aperture formed in a semiconductor substrate, such as a silicon substrate. The method for depositing liquid on the substrate can be carried out by positioning a substrate juxtaposed to the aperture of the micro liquid dispenser and then actuating the actuator of the dispenser to inject a liquid pillar from the aperture toward the substrate. Only a tip portion of liquid pillar contacts and thereby attaches to the surface of the substrate while the remaining portion of the liquid pillar breaks off and retracted into the aperture or the liquid storage chamber of the dispenser.
Source: USPTO / EPO open patent data. Objective bibliographic and citation counts.