Aqueous dispersions, process for their production, and their use

US6663683B2 · kind B2 · utility

Assignee

• Degussa AG · DE

Inventors

• Wolfgang Lortz · Wächtersbach, DE
• Christoph Batz-Sohn · Hanau, DE
• Gabriele Perlet · Großkrotzenburg, DE
• Werner Will · Gelnhausen, DE

Key dates

• Filing date: Nov 1, 2001
• Grant date: Dec 16, 2003
• Expiry date: Dec 27, 2021

Classification

• Technology area (CPC Y): Emerging Cross-Sectional Technologies
• CPC primary: Y10T428/31993
• WIPO field: Basic materials chemistry
• WIPO sector: Chemistry

Abstract

An aqueous dispersion containing a cerium oxide-doped, pyrogenically produced silicon dioxide, wherein the cerium oxide is introduced through an aerosol of a cerium salt solution or suspension and the average particle size in the dispersion is less than 100 nm. The dispersion is produced by dispersing the cerium oxide-doped, pyrogenically produced silicon dioxide in aqueous solution by means of a high energy input. The aqueous dispersion can be used for chemical-mechanical polishing.