Fabrication of thin-film optical devices
US6664124B1 · kind B1 · utility
Assignee
Inventors
Key dates
| Filing date | Apr 12, 2002 |
| Grant date | Dec 16, 2003 |
| Priority date | — |
| Expiry date | Apr 12, 2022 |
Classification
- Technology area (CPC G)Physics
- CPC primaryG02B5/285
- WIPO fieldOptics
- WIPO sectorInstruments
Abstract
A number of optical devices are fabricated by forming a pattern of channels on a first side of a substrate to define a plurality of mesas on the first side of the substrate. A thin-film optical structure is deposited onto each of the mesas. An excess thickness of the substrate is removed from each thin-film optical device, preferably by temporarily affixing a temporary support to the tops of each thin-film optical structure, removing an excess amount of the substrate from a second side of the substrate so that the thin-film optical devices are isolated from each other but affixed to the temporary support, and separating the tops of the thin-film optical structures from the temporary support.
Source: USPTO / EPO open patent data. Objective bibliographic and citation counts.