Scanning microscope, optical arrangement and method for imaging in scanning microscopy
US6664537B2 · kind B2 · utility
Assignee
Inventors
Key dates
| Filing date | Aug 3, 2001 |
| Grant date | Dec 16, 2003 |
| Priority date | — |
| Expiry date | Nov 18, 2021 |
Classification
- Technology area (CPC G)Physics
- CPC primaryG02B21/0076
- WIPO fieldOptics
- WIPO sectorInstruments
Abstract
A scanning microscope, in particular a confocal scanning microscope, with a light source (1), preferably a laser, for generating an illumination light beam (14) for a sample (11) and a scanning device for deflecting the illumination light beam (14) is, with a view to fast and reliable image-data acquisition and a compact structure, configured and refined in such a way that the scanning device has at least one micromirror (16). An optical arrangement with a light source (1), preferably a laser, for generating a light beam and at least one micromirror (16) for deflecting the light beam is furthermore provided, in which an adaptive lens (22) is provided for correcting for mirror defects or deformation of the mirror surface. Lastly, a method for imaging in scanning microscopy, in particular in confocal scanning microscopy, with a light source (1), preferably a laser, for generating an illumination light beam (14) for a sample (11) and a scanning device for deflecting the illumination light beam (14) is provided, in which at least one micromirror (16) is used in the scope of the scanning device.
Source: USPTO / EPO open patent data. Objective bibliographic and citation counts.