Magnetic field sensor using microelectromechanical system
US6664786B2 · kind B2 · utility
37Cited by
71References
50Claims
0Family size
Assignee
Inventors
Key dates
| Filing date | Sep 27, 2001 |
| Grant date | Dec 16, 2003 |
| Priority date | — |
| Expiry date | Oct 1, 2021 |
Classification
- Technology area (CPC G)Physics
- CPC primaryG01R15/20
- WIPO fieldMeasurement
- WIPO sectorInstruments
Abstract
A microelectromechanical systems (MEMS) Device manufactured on a microscopic scale using integrated circuit techniques provides a sensitive magnetic field sensor by detecting motion caused by the Lorentz force produced by a current through a MEMS conductor. The resulting MEMS may be used as a component in a variety of devices including current sensors and proximity sensors.
Source: USPTO / EPO open patent data. Objective bibliographic and citation counts.