Method of fabricating a planar pre-stressed bimorph actuator
US6665917B2 · kind B2 · utility
3Cited by
9References
1Claims
0Family size
Assignee
Inventors
Key dates
| Filing date | Feb 19, 2002 |
| Grant date | Dec 23, 2003 |
| Priority date | — |
| Expiry date | Feb 19, 2022 |
Classification
- Technology area (CPC Y)Emerging Cross-Sectional Technologies
- CPC primaryY10T29/4913
- WIPO fieldElectrical machinery, apparatus, energy
- WIPO sectorElectrical engineering
Abstract
The invention described and claimed is method of fabricating a planar pre-stressed bimorph actuator. The bimorph actuator is a symmetric load system composed of electrically and mechanically similar transductive elements. The method facilitates the bonding of planar metallic members about likewise planar transductive members thereby forming a planar multi-layer element. Fabricaton is performed at an elevated temperature under a vacuum with a mechanical load applied to the multi-layer element.
Source: USPTO / EPO open patent data. Objective bibliographic and citation counts.