Angular velocity sensor
US6666091B2 · kind B2 · utility
Assignee
Inventors
Key dates
| Filing date | Aug 23, 2002 |
| Grant date | Dec 23, 2003 |
| Priority date | — |
| Expiry date | Aug 23, 2022 |
Classification
- Technology area (CPC G)Physics
- CPC primaryG01C19/5607
- WIPO fieldMeasurement
- WIPO sectorInstruments
Abstract
An angular velocity sensor with improved detection chacteristics using a tuning fork vibrator made of a single crystalline piezoelectric material such as quartz. The turning fork vibrator includes two vibrators bonded together to provide an integral structure so that the vibrators by their respective crystal axis directions generate a piezoelectric phenomena in inverse polarities in their width directions. The tuning fork vibrator has two tuning fork arms and a tuning fork base. Two detection electrodes are respectively disposed on outer faces of the two tuning fork arms. And two other detection electrodes are respectively disposed on inner faces of the two tuning fork arms. Two drive electrodes are respectively disposed on the two tunings fork arms. The two detection electrodes disposed on the outer faces of the two tuning fork arms are commonly connected, and the two detection electrodes disposed on the inner faces of the two tuning fork arms are commonly connected for canceling capacitive coupling from drive section to detecting section.
Source: USPTO / EPO open patent data. Objective bibliographic and citation counts.