Advanced high speed, multi-level uncooled bolometer and method for fabricating same
US6667479B2 · kind B2 · utility
Assignee
Inventor
Key dates
| Filing date | Jun 1, 2001 |
| Grant date | Dec 23, 2003 |
| Priority date | — |
| Expiry date | Jan 2, 2022 |
Classification
- Technology area (CPC G)Physics
- CPC primaryG01J5/20
- WIPO fieldMeasurement
- WIPO sectorInstruments
Abstract
A microbolometer unit cell (10) includes a substantially planar upper-level incident radiation absorption and detection structure (24), a substantially planar middle-level radiation reflection structure (26) spaced apart from the upper-level incident radiation absorption and detection structure for defining an optical resonant cavity (36) there between, and a substantially planar lower-level thermal isolation leg structure (20) spaced apart from the middle-level radiation reflection structure and electrically coupled to the upper-level incident radiation absorption and detection structure and to an underlying readout circuit. The lower-level thermal isolation leg structure is electrically coupled to the upper-level incident radiation absorption and detection structure through a leg (44) that passes through an aperture (48) within the middle-level radiation reflection structure, the leg also functioning as a structural support member. The lower-level thermal isolation leg structure is electrically coupled to the readout circuit through another leg (18) that terminates on an electrical contact (16) disposed on an underlying readout integrated circuit (12), and the middle-level radiat…
Source: USPTO / EPO open patent data. Objective bibliographic and citation counts.