Digital process monitor
US6668346B1 · kind B1 · utility
29Cited by
9References
10Claims
0Family size
Assignee
Inventors
Key dates
| Filing date | Nov 10, 2000 |
| Grant date | Dec 23, 2003 |
| Priority date | — |
| Expiry date | Aug 27, 2021 |
Classification
- Technology area (CPC G)Physics
- CPC primaryG01R31/30
- WIPO fieldMeasurement
- WIPO sectorInstruments
Abstract
A digital process monitor for measuring the performance of an integrated circuit has been developed. The digital process monitor includes: a ring oscillator that generates a series of clocked pulses, and a ripple counter that counts the clocked pulses. The count is measured for a prescribed period of time and the count corresponds to the performance of the integrated circuit.
Source: USPTO / EPO open patent data. Objective bibliographic and citation counts.