Methods of fabricating high transition temperature SMA, and SMA materials made by the methods
US6669795B2 · kind B2 · utility
Assignee
Inventors
Key dates
| Filing date | Jan 17, 2002 |
| Grant date | Dec 30, 2003 |
| Priority date | — |
| Expiry date | Feb 24, 2022 |
Classification
- Technology area (CPC C)Chemistry; Metallurgy
- CPC primaryC23C14/548
- WIPO fieldSurface technology, coating
- WIPO sectorChemistry
Abstract
A method of fabricating ternary TiNi-based alloys to achieve substantially higher phase-change transition temperatures in the resulting SMA materials and which have optimal thermo-mechanical properties. One target is provided which comprises the element Ti, a second target comprises the element Ni and a third target comprises an element which when combined with Ti and Ni can produce a shape memory alloy. The three targets are co-sputtered onto a substrate at rates which are controlled so that the sum of the percentage composition of the elements that are from the left side of the periodic table are substantially 50 atomic percent, and the sum of percentage composition of the elements that are from the right side of the periodic table comprise the remaining 50 atomic percent.
Source: USPTO / EPO open patent data. Objective bibliographic and citation counts.