Optical waveguide with layered core and methods of manufacture thereof

US6670210B2 · kind B2 · utility

Assignee

• Intel Corporation · US

Inventor

• Kjetil Johannessen · Trondheim, NO

Key dates

• Filing date: May 1, 2002
• Grant date: Dec 30, 2003
• Expiry date: May 1, 2022

Classification

• Technology area (CPC G): Physics
• CPC primary: G02B2006/121
• WIPO field: Optics
• WIPO sector: Instruments

Abstract

A semiconductor waveguide is disclosed which includes a substrate coated with a cladding. A core is embedded in the cladding. The core includes a plurality of discreet stacked layers of core material surrounded by cladding material. The cladding and core layers each include silica and silicon nitride with the core layers having a higher nitrogen content than the cladding material. The core is fabricated by carefully manipulating the process parameters of a PECVD process.