Micro-thermocouple for a mass flow meter
US6670582B2 · kind B2 · utility
3Cited by
2References
6Claims
0Family size
Assignee
Inventors
Key dates
| Filing date | May 1, 2002 |
| Grant date | Dec 30, 2003 |
| Priority date | — |
| Expiry date | May 1, 2022 |
Classification
- Technology area (CPC G)Physics
- CPC primaryG01F1/692
- WIPO fieldMeasurement
- WIPO sectorInstruments
Abstract
Construction of a micro-thermocouple sensor designed to be incorporated in a mass flow meter for the circulation of gaseous fluids, includes of the following steps: depositing an insulating layer of several microns by electron gun on the sensor tube, then depositing the components of the thermocouple, by the electron gun, through the nickel masks, at a residual pressure lower than 10−6 torr, at a thickness of several thousand Angstroms, annealing of the capillary tube for one hour, then the mounting of a heating element on the capillary tube treated in this manner.
Source: USPTO / EPO open patent data. Objective bibliographic and citation counts.