Electron exposure device and method and electronic characteristics evaluation device using scanning probe
US6670622B2 · kind B2 · utility
1Cited by
3References
12Claims
0Family size
Assignee
Inventors
Key dates
| Filing date | Feb 26, 2002 |
| Grant date | Dec 30, 2003 |
| Priority date | — |
| Expiry date | Jul 12, 2022 |
Classification
- Technology area (CPC H)Electricity
- CPC primaryH01J2237/31752
- WIPO fieldMicro-structural and nano-technology
- WIPO sectorChemistry
Abstract
Current passed through a resist layer or insulating layer is controlled by changing the amplitude of an AC voltage to provide an electron exposure device or electric characteristics evaluation device using a scanning probe.
Source: USPTO / EPO open patent data. Objective bibliographic and citation counts.