Ink-jet recording head and method of producing the same
US6672713B2 · kind B2 · utility
Assignee
Inventors
Key dates
| Filing date | Jun 20, 2002 |
| Grant date | Jan 6, 2004 |
| Priority date | — |
| Expiry date | Jun 20, 2022 |
Classification
- Technology area (CPC Y)Emerging Cross-Sectional Technologies
- CPC primaryY10T29/49401
- WIPO fieldTextile and paper machines
- WIPO sectorMechanical engineering
Abstract
A highly accurate, downsized ink-jet recording head producible at low cost by using a thin-film deposition technology is provided.The ink-jet recording head, in which a piezoelectric layer is formed subsequent to an electrode layer on a substrate by using a thin-film deposition technology and an energy-generating element for generating energy for ink ejection is formed by etching the electrode and the piezoelectric layers simultaneously by an ion milling process, includes a fine powder reception part on which mixed fine powders including at least those etched off the electrode layer and the piezoelectric layer by the ion milling process are deposited, the fine powder reception part being provided in a periphery of the energy-generating element.
Source: USPTO / EPO open patent data. Objective bibliographic and citation counts.