Laser beam homogenizer
US6672739B1 · kind B1 · utility
15Cited by
3References
40Claims
0Family size
Assignee
Inventors
Key dates
| Filing date | Aug 30, 1999 |
| Grant date | Jan 6, 2004 |
| Priority date | — |
| Expiry date | Aug 30, 2019 |
Classification
- Technology area (CPC Y)Emerging Cross-Sectional Technologies
- CPC primaryY10S977/951
- WIPO fieldOptics
- WIPO sectorInstruments
Abstract
An apparatus, system, and method for illuminating a lithographic mask or an object in a microscope is presented, whereby the output of a laser beam homogenizer is imaged on to a field such as the object plane for lithographic application or on to the rear focal plane of an epi illuminating objective lens as a source for wide field illumination at an object plane in a microscope (for application to magnified imaging of weak phase objects)., and the image of the output is dithered with respect to the field
Source: USPTO / EPO open patent data. Objective bibliographic and citation counts.