Vacuum pump
US6672827B2 · kind B2 · utility
Assignee
Inventors
Key dates
| Filing date | Oct 30, 2001 |
| Grant date | Jan 6, 2004 |
| Priority date | — |
| Expiry date | Nov 5, 2021 |
Classification
- Technology area (CPC F)Mechanical Engineering; Lighting; Heating
- CPC primaryF04D19/044
- WIPO fieldEngines, pumps, turbines
- WIPO sectorMechanical engineering
Abstract
To provide a small vacuum pump making it possible to efficiently perform evacuation from the atmosphere to a high vacuum (degree of vacuum: 10−5 Pa) by using a single pump unit. A turbo-molecular pump mechanism portion is arranged on the high-vacuum side, a volute pump mechanism portion is arranged on the atmosphere side, and a thread groove pump mechanism portion is arranged between the turbo-molecular pump mechanism portion and the volute pump mechanism portion. Further, rotor blades of the turbo-molecular pump mechanism portion, a rotor of the thread groove pump mechanism portion, and an impeller of the volute pump mechanism portion are integrally mounted to a single rotor shaft, which is rotated by a single motor.
Source: USPTO / EPO open patent data. Objective bibliographic and citation counts.