Vacuum pump
US6672828B2 · kind B2 · utility
0Cited by
7References
10Claims
0Family size
Assignee
Inventor
Key dates
| Filing date | Jun 3, 2002 |
| Grant date | Jan 6, 2004 |
| Priority date | — |
| Expiry date | Jun 24, 2022 |
Classification
- Technology area (CPC F)Mechanical Engineering; Lighting; Heating
- CPC primaryF04D23/008
- WIPO fieldEngines, pumps, turbines
- WIPO sectorMechanical engineering
Abstract
A turbomolecular vacuum pump (5) comprises a first pumping section (1) having pumping stages with bladed rotor discs, a second pumping section (2) having pumping stages with smooth rotor discs, a third pumping section (3) having a pumping stage with a toothed rotor disc (26), and a fourth pumping section (4) of the ejector or venturi pump type. (FIG. 1a)
Source: USPTO / EPO open patent data. Objective bibliographic and citation counts.