Vacuum microelectronic device and method
US6672925B2 · kind B2 · utility
41Cited by
13References
12Claims
0Family size
Assignee
Inventors
Key dates
| Filing date | Aug 17, 2001 |
| Grant date | Jan 6, 2004 |
| Priority date | — |
| Expiry date | Jan 11, 2022 |
Classification
- Technology area (CPC Y)Emerging Cross-Sectional Technologies
- CPC primaryY10S977/939
- WIPO fieldElectrical machinery, apparatus, energy
- WIPO sectorElectrical engineering
Abstract
A vacuum microelectronic device (10,40) emits electrons (37) from surfaces of nanotube emitters (17, 18). Extracting electrons from the surface of each nanotube emitter (17) results is a small voltage variation between each emitter utilized in the device (10, 40). Consequently, the vacuum microelectronic device (10,40) has a more controllable turn-on voltage and a consistent current density from each nanotube emitter (17,18).
Source: USPTO / EPO open patent data. Objective bibliographic and citation counts.