Vapor phase surface modification of composite substrates to form a molecularly thin release layer
US6673287B2 · kind B2 · utility
11Cited by
12References
15Claims
0Family size
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Key dates
| Filing date | May 16, 2001 |
| Grant date | Jan 6, 2004 |
| Priority date | — |
| Expiry date | Aug 7, 2021 |
Classification
- Technology area (CPC G)Physics
- CPC primaryG03F7/405
- WIPO fieldMicro-structural and nano-technology
- WIPO sectorChemistry
Abstract
A method of exposing a composite organic/inorganic master to alkylchlorosilanes in the vapor phase. Chlorosilanes participate in facile reactions with hydroxyl groups existing on the surface of inorganic oxides (such as glass or the native oxides on silicon, aluminum, tin, etc.); or those in organics-containing phenolic or alcoholic groups, such as photoresists. The alkyl group on the silane can be chosen from a large selection of aliphatic or aromatic organic groups that have substituents with varying polarity and reactivity.
Source: USPTO / EPO open patent data. Objective bibliographic and citation counts.