Transparent article having protective silicon nitride film
US6673438B1 · kind B1 · utility
17Cited by
66References
18Claims
0Family size
Assignee
Inventors
Key dates
| Filing date | Nov 10, 1998 |
| Grant date | Jan 6, 2004 |
| Priority date | — |
| Expiry date | Nov 10, 2018 |
Classification
- Technology area (CPC Y)Emerging Cross-Sectional Technologies
- CPC primaryY10T428/265
- WIPO fieldMaterials, metallurgy
- WIPO sectorChemistry
Abstract
Transparent articles comprising transparent, nonmetallic substrate and a transparent film stack is sputter deposited on the substrate. The film stack is characterized by including at least one infrared reflective metal film, a dielectric film over the metal film, and a protective silicon nitride film of 10 å to 150 å in thickness over the said dielectric film. The dielectric film desirably has substantially the same index of refraction as does silicon nitride and is contiguous with the silicon nitride film.
Source: USPTO / EPO open patent data. Objective bibliographic and citation counts.