Optical near-field microscope

US6674057B1 · kind B1 · utility

Assignee

• Carl Zeiss Jena GmbH · DE

Inventors

• Winfried Wiegraebe · Jena, DE
• Torsten Antrack · Berlin, DE
• Ralph Lange · Rutesheim, DE

Key dates

• Filing date: May 4, 2000
• Grant date: Jan 6, 2004
• Expiry date: May 4, 2020

Classification

• Technology area (CPC G): Physics
• CPC primary: G01Q60/22
• WIPO field: Measurement
• WIPO sector: Instruments

Abstract

Near-field optical microscope with a probe tip which is arranged on one side of a light-transmitting specimen and moved in a scanning manner. The probe tip serves as a point light source. Optics for collecting light transmitted through the specimen and transmitting it to a detection unit or for collecting illumination light are provided on the other side of the specimen. The movement of the probe tip is adapted to on the detection side, or the probe serves to detect specimen light. A detection unit is arranged following the probe in the direction of illumination, and a scanning illumination adapted to the probe movement is carried out on the other side of the specimen.