Thermo-sensitive flow rate sensor
US6675644B2 · kind B2 · utility
Assignee
Inventors
Key dates
| Filing date | Apr 12, 1999 |
| Grant date | Jan 13, 2004 |
| Priority date | — |
| Expiry date | Apr 12, 2019 |
Classification
- Technology area (CPC G)Physics
- CPC primaryG01F1/692
- WIPO fieldMeasurement
- WIPO sectorInstruments
Abstract
A thermo-sensitive flow rate sensor that comprises a plate-like substrate, a part of which is removed so that a space is provided therein, a diaphragm portion formed like a thin layer above the space in such a manner as to be integral with the plate-like substrate, and a heating element constituted by a thermo-sensitive electrically resistant film formed on the diaphragm. Plural holes penetrating the diaphragm portion are bored in an outer peripheral portion of the heating element. Each of the plurality of holes is shaped in such a way as to have obtuse corner portions or to have substantially no corner portions. The thermo-sensitive flow rate sensor measures the flow rate of a fluid, which is to be measured, according to an amount of heat transferred to the fluid from a part heated by energizing the heating element.
Source: USPTO / EPO open patent data. Objective bibliographic and citation counts.