Gas friction pump
US6676384B2 · kind B2 · utility
2Cited by
4References
9Claims
0Family size
Assignee
Inventor
Key dates
| Filing date | Mar 7, 2002 |
| Grant date | Jan 13, 2004 |
| Priority date | — |
| Expiry date | Mar 12, 2022 |
Classification
- Technology area (CPC F)Mechanical Engineering; Lighting; Heating
- CPC primaryF04D29/263
- WIPO fieldEngines, pumps, turbines
- WIPO sectorMechanical engineering
Abstract
A vacuum pump including two gas friction pumps arranged parallel to each other and having each at least one stage having an inlet communicating with a common suction region and an outlet communicating with a separate discharge region, a multi-stage pump arranged downstream of the two gas friction pumps, connection conduits for communicating the separate discharge regions with a common discharge chamber, and a conduit for communicating the common discharge chamber with the suction chamber of the downstream pump.
Source: USPTO / EPO open patent data. Objective bibliographic and citation counts.