Aqueous dispersion, a process for the preparation and the use thereof

US6676719B2 · kind B2 · utility

Assignee

• Degussa AG · DE

Inventors

• Wolfgang Lortz · Wächtersbach, DE
• Christoph Batz-Sohn · Hanau, DE
• Helmut Mangold · Rodenbach, DE
• Gabriele Perlet · Großkrotzenburg, DE
• Werner Will · Gelnhausen, DE

Key dates

• Filing date: Dec 21, 2001
• Grant date: Jan 13, 2004
• Expiry date: Dec 21, 2021

Classification

• Technology area (CPC C): Chemistry; Metallurgy
• CPC primary: C01P2006/80
• WIPO field: Basic materials chemistry
• WIPO sector: Chemistry

Abstract

A pyrogenic process is used to prepare alkali-doped silica particles. Particles produced by this process exhibit homogeneous doping, reduced agglomeration, greater stability and higher removal rates. Aqueous dispersions containing alkali-doped pyrogenic silica with average particle size less than 100 nm are used for polishing surfaces (CMP).