Technology for fabrication of a micromagnet on a tip of a MFM/MRFM probe

US6676813B1 · kind B1 · utility

Assignee

• The Regents of the University of California · US

Inventors

• Denis V. Pelekhov · Los Alamos, US
• P. Chris Hammel · Santa Fe, US
• Geoffrey Nunes · Swarthmore, US
• Melissa M. Midzor · Camarillo, US
• Michael L. Roukes · Pasadena, US

Key dates

• Filing date: Mar 13, 2002
• Grant date: Jan 13, 2004
• Expiry date: Jun 28, 2022

Classification

• Technology area (CPC Y): Emerging Cross-Sectional Technologies
• CPC primary: Y10S977/865
• WIPO field: Measurement
• WIPO sector: Instruments

Abstract

A method for coating the tip of a mechanical resonator for use in magnetic force microscopy and magnetic resonance force microscopy in which the tip is coated with a ferromagnetic material and the cantilever is not, and the product resulting from the method. A cantilever and incorporated tip are coated with a photoresist, except that surface tension keeps photoresist off the tip. The cantilever and tip are then coated with a magnetic material. Next, acetone is used to lift off the magnetic material from the cantilever but not from the tip.