Methods and apparatus for surface analysis
US6678043B1 · kind B1 · utility
13Cited by
14References
15Claims
0Family size
Inventors
Key dates
| Filing date | Oct 31, 2000 |
| Grant date | Jan 13, 2004 |
| Priority date | — |
| Expiry date | Oct 10, 2021 |
Classification
- Technology area (CPC G)Physics
- CPC primaryG01N21/95607
- WIPO fieldMeasurement
- WIPO sectorInstruments
Abstract
There is described method and apparatus to create multi-dimensional non-spatial histograms of surfaces and to compare such histograms to show whether the surfaces substantially conform to one another. This analysis is particularly applicable to comparing die on wafers to determine whether manufactured devices conform to a master or whether one die is like another.
Source: USPTO / EPO open patent data. Objective bibliographic and citation counts.