Integrated alignment and calibration of optical system
US6678058B2 · kind B2 · utility
11Cited by
5References
20Claims
0Family size
Assignee
Inventors
Key dates
| Filing date | Oct 24, 2001 |
| Grant date | Jan 13, 2004 |
| Priority date | — |
| Expiry date | Apr 14, 2022 |
Classification
- Technology area (CPC G)Physics
- CPC primaryG01N21/956
- WIPO fieldMeasurement
- WIPO sectorInstruments
Abstract
A calibration system within an optical inspection apparatus comprising a sensor, lens, fiducials, and a CPU. The CPU is configured to receive information from the sensor relating to the fiducial coordinate system and the sensor coordinate system, and the fiducials are used to determine a physical relationship between the sensor coordinates and fiducial coordinates. The calibration system has a means for calibrating the inspection system and measuring critical dimensions of an object in an accurate manner on-the-fly without additional set-up or manual calibration of the system.
Source: USPTO / EPO open patent data. Objective bibliographic and citation counts.