Efficient thermal activation optical switch and method of making the same
US6678435B2 · kind B2 · utility
3Cited by
6References
19Claims
0Family size
Assignees
Inventors
Key dates
| Filing date | May 18, 2001 |
| Grant date | Jan 13, 2004 |
| Priority date | — |
| Expiry date | Sep 8, 2021 |
Classification
- Technology area (CPC G)Physics
- CPC primaryG02B2006/12145
- WIPO fieldOptics
- WIPO sectorInstruments
Abstract
An optical switch having an insulator under a heater element is disclosed. The insulator reduces the heat loss thereby making the switch more efficient. The insulator is fabricated embedded in the underlying substrate on which the heater and the optical intersection are fabricated. A method of fabricating the optical switch having an insulator is disclosed. A trench is etched on the substrate and filled with oxide or other suitable insulating material. Then, the heater and the optical intersection are fabricated above the insulator.
Source: USPTO / EPO open patent data. Objective bibliographic and citation counts.