Patent · US Expired

Pressure-measuring cell with a temperature sensor

US6681637B2 · kind B2 · utility

5Cited by

6References

10Claims

0Family size

Assignee

VEGA Grieshaber KG · DE

Inventors

Joern Jacob · Kirnbach, DE
Ewald Boehler · Furtwangen, DE
Manfred Liehr · Hamburg, DE

Key dates

Filing date	Jul 17, 2001
Grant date	Jan 27, 2004
Priority date	—
Expiry date	Jul 17, 2021

Classification

Technology area (CPC G)Physics
CPC primaryG01L9/0075
WIPO fieldMeasurement
WIPO sectorInstruments

Abstract

A pressure-measuring cell having a base and a diaphragm positioned on the base is deformed by a pressure being measured. A temperature-measuring sensor is positioned between the diaphragm and the base preferably embedded in a material layer that seals a compartment. The diaphragm is preferably made of a ceramic and the material layer is preferably made of a glass.

Source: USPTO / EPO open patent data. Objective bibliographic and citation counts.