Reusable mass-sensor in manufacture of organic light-emitting devices
US6682600B2 · kind B2 · utility
Inventors
Key dates
| Filing date | Jan 28, 2003 |
| Grant date | Jan 27, 2004 |
| Priority date | — |
| Expiry date | Mar 2, 2023 |
Classification
- Technology area (CPC H)Electricity
- CPC primaryH10K50/11
- WIPO fieldSurface technology, coating
- WIPO sectorChemistry
Abstract
A method for controlling the deposition of an organic layer in making an organic light-emitting device includes depositing at a deposition zone organic material forming a layer of the organic light-emitting device and providing a movable sensor which, when moved into the deposition zone and is being coated during the depositing step, provides a signal representing the deposition rate and thickness of the organic material forming the layer. The method also includes controlling the deposition of the organic material in response to the signal to control the deposition rate and thickness of the deposited organic material forming the layer, moving the movable sensor from the deposition zone to a cleaning position, and removing organic material from the movable sensor to permit reuse of the movable sensor.
Source: USPTO / EPO open patent data. Objective bibliographic and citation counts.