Patent · US Expired

System and method for irradiation with improved dosage uniformity

US6683319B1 · kind B1 · utility

12Cited by
88References
25Claims
0Family size

Assignee

Inventors

Key dates

Filing dateJul 16, 2002
Grant dateJan 27, 2004
Priority date
Expiry dateJul 16, 2022

Classification

  • Technology area (CPC G)Physics
  • CPC primaryG21K5/10
  • WIPO fieldEngines, pumps, turbines
  • WIPO sectorMechanical engineering

Abstract

A system and method for providing irradiation to material shapes an electron beam into a profile having a substantially rectangular intensity distribution. The profile is deflected onto the material in a pattern with substantial overlap in a first dimension and without substantial overlap in a second dimension. In an exemplary embodiment, irradiation is provided to the material from first and second opposite sides.

Source: USPTO / EPO open patent data. Objective bibliographic and citation counts.